A mechanics prediction of the behaviour of mono-crystalline silicon under nano-indentation

This paper uses a new constitutive model developed recently by the authors to analyse the multi-phase transformations in mono-crystalline silicon when subjected to nano-indentation. The finite element method is employed to the integration of the stress–strain relationship. A very good agreement is reached with the experimental measurements, with an accurate prediction of the observed pop-in and pop-out and detailed phase transformation events in loading and unloading. It was found that due to the change of microstructures, the material in the deformation zone could experience a local unloading during indentation loading or undergo a local loading during indentation unloading. The phase transformation events during indentation are closely related to the variation of both the deviatoric and hydrostatic stress components. 2003 Elsevier Science Ltd. All rights reserved.